认 证:工商信息已核实
访问量:614747
分子泵(Turbo Molecular Pump)主要用于为制造太阳能电池和半导体提供不可或缺的真空环境。岛津分子泵有着世界高水准的排气能力,并且有一系列的产品可以满足不同的太阳能电池模组和硅晶片的工艺需求,随着市场的扩大,我们开发的脚步也从未停止。
• 超大的排气流量
• 优异的耐腐蚀性能
• 外形紧凑的控制器
• 应对生成物对策(选购件)
• 各种监测功能
• 网络接入对应
• 泵转速可调
• 消费电力削减
• 适用于各种规格
• 无需调整(泵电缆更换时,无需对控制器再次调整)
• 无需蓄电池
Maximum pumping flowrate
High pumping throughput is achieved with a compact body.
Excellent corrosion resistance
Resistant to corrosive gas because dispersed plating is used on the
rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent
heat release characteristic prevents overheat of the rotor caused by
high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.
Compact power supply unit
49 % smaller and 50 % lighter as compared to Shimadzu's previous models
Measures against reaction products (optional)
Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.
Various monitoring functions
LCD on the front panel displays the current, pumping speed, unbalance
amount, errors, and other information. Equipped with a maintenance call
timer.
Equipped with a RS-232C port on the front panel so that operation
information can be loaded on a computer while the pump is operating. You
can find abnormalities (increase of back pressure due to an adhered
reaction product, etc.) in early stages if you compare the condition
with the normal condition. This helps to protect the system from
problems and keep it in good condition.
Network connection enabled
Equipped with RS-232C and RS-485 compliant serial communication
ports, which enables operations to start/stop pumps, monitor operation
status, and load operation history. Up to 32 pumps can be monitored
using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.
Variable pump speed
The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.
Reduced power consumption • Compliant with major standards
CE marking, TÜV
NRTL (UL61010A-1)
SEMI S2
SEMI F47
SEMI E74
Tuning-free
Readjustment of the power supply unit is unnecessary during pump cable replacement.
Battery-less
In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.
- 推荐产品
- 供应产品
- 产品分类