MIL 8000 晶圆检测系统

它除了可以用于宏观和微观检测外，也可以作为一晶圆底部检测的工具。除此外，它还是一显微镜晶圆检测系统的进样部件。它拥有目前***的样品处理系统功能，包括激光配对，样品接收选择和SPC软件；

大大减少了操作时间和提高处理较薄晶圆样品的效率。

此系统，拥有了微观和宏观晶圆的检测功能，也可以对晶圆底进行全景的检测。

Proteus Inspection is a compact， table top machine for wafer inspection

It is designed to be a macro and back inspection tool， and to act as a microscope loader for a complete wafer inspection.

The tool is equipped with the most updated handling systems ad features laser mapping， recipe selection and optional SPC software.

This equipment have been designed to fulfill the needs of short cycle times as well as the increasing difficulties due to thin wafers handling.

Such needs required a careful design， based on the state of the art technological solutions for both mechanics and control system.

Proteus Loader， in its fully equipped version， features micro and macro inspection capabilities， including a backside inspection with the full view of wafer bottom.